US 11,947,265 B2
Optical diffraction component
Heiko Feldmann, Aalen (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Feb. 17, 2022, as Appl. No. 17/673,966.
Application 17/673,966 is a continuation of application No. PCT/EP2020/070424, filed on Jul. 20, 2020.
Claims priority of application No. 102019213063.1 (DE), filed on Aug. 30, 2019.
Prior Publication US 2022/0171292 A1, Jun. 2, 2022
Int. Cl. G03F 7/00 (2006.01); G02B 5/08 (2006.01); G02B 5/18 (2006.01)
CPC G03F 7/70158 (2013.01) [G02B 5/0891 (2013.01); G02B 5/1838 (2013.01); G03F 7/70175 (2013.01); G03F 7/70191 (2013.01); G03F 7/70575 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An optical diffraction component, comprising:
a periodic grating structure profile comprising diffraction structures,
wherein:
each diffraction structure has exactly a first diffraction structure level, a second diffraction structure level and a third diffraction structure level;
the first diffraction structure level is equal to a reference plane;
the second diffraction structure level is above the reference plane;
the third diffraction structure level is below the reference plane;
the first, second and third diffraction structure levels define a topography of a grating period of the grating structure profile;
the grating period repeats regularly along a period running direction;
along the period running direction, the first diffraction structure level extends less than 50% of the grating period;
the diffraction structures are configured so that, during use of the optical diffraction component, a wavelength range around two different target wavelengths diffracted by the periodic grating structure profile comprises radiation components with three different phases that interfere destructively with one another;
a difference between the two different target wavelengths is less than 50%; and
the two target wavelengths differ by at least 1%.