CPC G03F 7/70025 (2013.01) [F04D 23/00 (2013.01); F04D 29/667 (2013.01); H01S 3/036 (2013.01); H01S 3/225 (2013.01)] | 14 Claims |
1. A laser chamber of a discharge-excitation-type gas laser apparatus, comprising:
a container which contains laser gas therein;
a pair of discharge electrodes arranged in the container;
a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and
a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades,
wherein a position of the end portion in the rotation direction changes in accordance with a position of the end portion in the axial direction, and
wherein a cycle of the position of the end portion in the rotation direction is equal to or smaller than twice a wavelength of an acoustic wave generated between the cross flow fan and the stabilizer.
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