US 11,947,263 B2
Laser chamber and electronic device manufacturing method
Makoto Tanaka, Oyama (JP); Yosuke Fujimaki, Oyama (JP); Takashi Ito, Oyama (JP); and Yousuke Kawagoe, Oyama (JP)
Assigned to Gigaphoton Inc., Tochigi (JP)
Filed by Gigaphoton Inc., Tochigi (JP)
Filed on Dec. 3, 2021, as Appl. No. 17/457,514.
Application 17/457,514 is a continuation of application No. PCT/JP2019/026416, filed on Jul. 3, 2019.
Prior Publication US 2022/0091515 A1, Mar. 24, 2022
Int. Cl. G03F 7/20 (2006.01); F04D 23/00 (2006.01); F04D 29/66 (2006.01); G03F 7/00 (2006.01); H01S 3/036 (2006.01); H01S 3/225 (2006.01)
CPC G03F 7/70025 (2013.01) [F04D 23/00 (2013.01); F04D 29/667 (2013.01); H01S 3/036 (2013.01); H01S 3/225 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A laser chamber of a discharge-excitation-type gas laser apparatus, comprising:
a container which contains laser gas therein;
a pair of discharge electrodes arranged in the container;
a cross flow fan configured to supply the laser gas to a discharge space between the discharge electrodes, the cross flow fan including a rotation shaft with which the cross flow fan rotates in a predetermined rotation direction and a plurality of blades, each longitudinal direction of which is parallel to an axial direction of the rotation shaft; and
a stabilizer arranged outside a rotation trajectory of the cross flow fan, and arranged such that a difference between a maximum position and a minimum position of an end portion in the rotation direction on a side opposite to the rotation direction is larger than 0 and is smaller than an interval of two blades adjacent to each other among the plurality of blades,
wherein a position of the end portion in the rotation direction changes in accordance with a position of the end portion in the axial direction, and
wherein a cycle of the position of the end portion in the rotation direction is equal to or smaller than twice a wavelength of an acoustic wave generated between the cross flow fan and the stabilizer.