US 11,947,256 B2
Simultaneous double-side coating of multilayer graphene pellicle by local thermal processing
Evgenia Kurganova, Nijmegen (NL); Adrianus Johannes Maria Giesbers, Vlijmen (NL); Maxim Aleksandrovich Nasalevich, Eindhoven (NL); Arnoud Willem Notenboom, Rosmalen (NL); Mária Péter, Eindhoven (NL); Pieter-Jan Van Zwol, Eindhoven (NL); David Ferdinand Vles, Eindhoven (NL); and Willem-Pieter Voorthuijzen, 's-Hertogenbosch (NL)
Assigned to ASML NETHERLANDS B.V., Veldhoven (NL)
Appl. No. 16/634,910
Filed by ASML NETHERLANDS B.V., Veldhoven (NL)
PCT Filed Jun. 26, 2018, PCT No. PCT/EP2018/067052
§ 371(c)(1), (2) Date Jan. 29, 2020,
PCT Pub. No. WO2019/025082, PCT Pub. Date Feb. 7, 2019.
Claims priority of application No. 17184701 (EP), filed on Aug. 3, 2017.
Prior Publication US 2020/0159107 A1, May 21, 2020
Int. Cl. G03F 1/62 (2012.01); C01B 32/186 (2017.01); G03F 7/00 (2006.01)
CPC G03F 1/62 (2013.01) [C01B 32/186 (2017.08); G03F 7/70958 (2013.01); G03F 7/70983 (2013.01)] 22 Claims
OG exemplary drawing
 
1. A method of manufacturing a pellicle for a lithographic apparatus, the method comprising:
locally heating the pellicle using radiative heating, the pellicle, when being heated, is freestanding and is substantially transmissive for EUV radiation, and
depositing a coating material simultaneously on both sides of the pellicle.