CPC G03F 1/62 (2013.01) [C01B 32/186 (2017.08); G03F 7/70958 (2013.01); G03F 7/70983 (2013.01)] | 22 Claims |
1. A method of manufacturing a pellicle for a lithographic apparatus, the method comprising:
locally heating the pellicle using radiative heating, the pellicle, when being heated, is freestanding and is substantially transmissive for EUV radiation, and
depositing a coating material simultaneously on both sides of the pellicle.
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