US 11,947,202 B2
Phase modulator device and method
Sébastien Cremer, Sassenage (FR); Frédéric Boeuf, St Nazaire les Eymes (FR); and Stephane Monfray, Eybens (FR)
Assigned to STMicroelectronics (Crolles 2) SAS, Crolles (FR)
Filed by STMicroelectronics (Crolles 2) SAS, Crolles (FR)
Filed on Apr. 3, 2023, as Appl. No. 18/295,121.
Application 18/295,121 is a continuation of application No. 16/988,480, filed on Aug. 7, 2020, granted, now 11,644,697.
Claims priority of application No. 1909284 (FR), filed on Aug. 19, 2019.
Prior Publication US 2023/0236446 A1, Jul. 27, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G02F 1/01 (2006.01); G02B 6/12 (2006.01); G02F 1/035 (2006.01)
CPC G02F 1/035 (2013.01) [G02B 6/12004 (2013.01); G02F 1/0147 (2013.01); G02F 2201/063 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A manufacturing method, comprising:
forming a waveguide from a first material, the waveguide used to guide an optical signal, the waveguide having a first side adjacent to an insulating layer, a second side and a third side perpendicular to the first side, and a fourth side parallel to the first side; and
forming a layer made of a second material, the second material being electrically conductive and transparent to a wavelength of the optical signal, the layer being disposed over the first side, the second side, the third side, and the fourth side of the waveguide, the layer being in direct contact with the first side, the second side, the third side, the fourth side, or a combination thereof.