US 11,947,168 B2
Stacked edge couplers in the back-end-of-line stack of a photonic chip
Yusheng Bian, Ballston Lake, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Apr. 5, 2022, as Appl. No. 17/658,092.
Prior Publication US 2023/0314708 A1, Oct. 5, 2023
Int. Cl. G02B 6/30 (2006.01); G02B 6/12 (2006.01); G02B 6/122 (2006.01)
CPC G02B 6/305 (2013.01) [G02B 6/12004 (2013.01); G02B 6/1228 (2013.01); G02B 2006/12147 (2013.01); G02B 2006/12166 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A stacked edge coupler, comprising:
an insulator layer;
a first assisting waveguide on the insulator layer, the first assisting waveguide comprises an end surface;
a waveguide core over the first assisting waveguide, the waveguide core comprising a tapered section having an end surface, and the end surface of the tapered section of the waveguide core is substantially coplanar with the end surface of the first assisting waveguide; and
a back-end-of-line stack over the waveguide core, the back-end-of-line stack comprises:
a side edge;
a dielectric layer; and
a second assisting waveguide on the dielectric layer adjacent to the side edge, and the second assisting waveguide has an overlapping arrangement with the tapered section of the waveguide core.