US 11,946,950 B2
Electro-optical circuit board for contacting photonic integrated circuits
Philipp Huebner, Hamburg (DE); and Stefan Richter, Jena (DE)
Assigned to Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed by Carl Zeiss SMT GmbH, Oberkochen (DE)
Filed on Oct. 5, 2020, as Appl. No. 17/062,954.
Application 17/062,954 is a continuation of application No. PCT/EP2019/058777, filed on Apr. 8, 2019.
Claims priority of application No. 102018108283.5 (DE), filed on Apr. 9, 2018.
Prior Publication US 2021/0033643 A1, Feb. 4, 2021
Int. Cl. G01R 1/07 (2006.01); G01R 1/073 (2006.01); G01R 31/311 (2006.01); G02B 6/26 (2006.01); G02B 26/08 (2006.01)
CPC G01R 1/071 (2013.01) [G01R 1/073 (2013.01); G01R 31/311 (2013.01); G02B 6/26 (2013.01); G02B 26/0816 (2013.01)] 25 Claims
OG exemplary drawing
 
1. A system, comprising:
an electro-optical circuit board, comprising:
an electrical conductor track extending between first and second sides of the electro-optical circuit board; and
an optical beam path extending between the first and second sides of the electro-optical circuit board; and
an optical testing device, comprising:
a light source; and
a scanning device,
wherein:
the optical testing device is configured to drive the light source and the scanning device so that when the optical testing device drives the light source and the scanning device: i) the light source emits a light beam; and ii) the scanning device varies a location of the light beam on a first side of the electro-optical circuit board;
the electrical conductor track is configured to contact an electrical interface of a photonic integrated circuit adjacent the second side of the electrical conductor track; and
the optical beam path is configured to contact an optical interface of the photonic integrated circuit adjacent the second side of the electrical conductor track.