US 11,946,945 B2
Sample analyzing method and sample preparing method
Keng-Chieh Chu, New Taipei (TW); Tsung-Ju Chan, Miaoli County (TW); Chun-Wei Wu, New Taipei (TW); and Hung-Jen Chen, Hsinchu (TW)
Assigned to MATERIALS ANALYSIS TECHNOLOGY INC., Hsinchu County (TW)
Filed by Materials Analysis Technology Inc., Hsinchu County (TW)
Filed on Jul. 29, 2021, as Appl. No. 17/388,125.
Claims priority of application No. 110113511 (TW), filed on Apr. 15, 2021.
Prior Publication US 2022/0334140 A1, Oct. 20, 2022
Int. Cl. H01J 37/20 (2006.01); G01N 35/00 (2006.01); G06K 7/14 (2006.01); H01J 37/26 (2006.01)
CPC G01N 35/00732 (2013.01) [G06K 7/1413 (2013.01); H01J 37/26 (2013.01); G01N 2035/00752 (2013.01); H01J 2237/20292 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A sample analyzing method, comprising:
a sample preparing step implemented at least once, wherein the sample preparing step includes:
a marking and cutting step including:
utilizing a marking equipment to form a plurality of assembled mark structures having different styles on a large size substrate;
utilizing a cutting equipment to perform a cutting operation on the large size substrate at least once, so that the large size substrate is cut into a plurality of small size substrates, wherein each of the small size substrates includes one of the assembled mark structures; and
utilizing a sampling equipment to cut one of the small size substrates to obtain at least one sample
a preparation step implemented by placing the at least one sample onto at least one mesh structure of the sample carrying component, and placing the sample carrying component having the at least one sample disposed thereon into one of a plurality of accommodating slots of a storage box, and wherein, in the marking and placing step, the sample carrying component having the at least one sample disposed thereon is taken out from the one of the accommodating slots of the storage box, and utilizing an input device to input a content presented by a mark structure of the storage box near the one of the accommodating slots to the input device to form the identification information;
an obtaining step implemented by obtaining an identification information, wherein the identification information is configured to indicate a position of one of the accommodating slots of the storage box, and the storage box includes the accommodating slots; and
a marking and placing step implemented by placing a sample carrying component having the at least one sample disposed thereon into the marking equipment, allowing the marking equipment to utilize the identification information to form an identification structure on the sample carrying component, and placing the sample carrying component into a corresponding one of the accommodating slots according to the identification information, wherein the sample carrying component includes a main body and the at least one mesh structure, the main body has at least one thru-hole penetrating through the main body, the at least one mesh structure is connected to the main body, the at least one mesh structure is arranged in the at least one thru-hole, the at least one mesh structure divides the at least one thru-hole into a plurality of meshes, and the at least one mesh structure is configured to carry the at least one sample;
a placing step implemented by taking out the sample carrying component having the identification structure from one of the accommodating slots of the storage box, and placing the sample carrying component into an electron microscope equipment; and
an analyzing step implemented by utilizing the electron microscope equipment to photograph the at least one sample to generate an analysis image.