CPC G01N 21/956 (2013.01) [G01N 21/9501 (2013.01); G03F 7/70616 (2013.01); G03F 7/70625 (2013.01); G01B 2210/56 (2013.01)] | 20 Claims |
11. An optical system configured to measure patterned structures, the optical system comprises:
an optical measurement device configured to perform optical measurements on a known structure, wherein the optical measurements differ from each other by a light spot characteristic to obtain multiple optical measurement results; wherein each optical measurement comprises concurrently illuminating parts of multiple regions that differ from each other and belong to the known structure; wherein for each optical measurement the detected light comprises different fields that are mixed, wherein a manner in which the different fields are mixed are indicated by mixing factors; and
a processor that is configured to determine, based on the optical measurements, values of the mixing factors and a dependency of the optical measurement results on the light spot characteristic.
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