US 11,946,569 B2
Actuating and sensing module
Hao-Jan Mou, Hsinchu (TW); Shih-Chang Chen, Hsinchu (TW); Jia-Yu Liao, Hsinchu (TW); Hung-Hsin Liao, Hsinchu (TW); Chung-Wei Kao, Hsinchu (TW); Chi-Feng Huang, Hsinchu (TW); Yung-Lung Han, Hsinchu (TW); Chang-Yen Tsai, Hsinchu (TW); and Wei-Ming Lee, Hsinchu (TW)
Assigned to MICROJET TECHNOLOGY CO., LTD., Hsinchu (TW)
Filed by Microjet Technology Co., Ltd., Hsinchu (TW)
Filed on Apr. 19, 2021, as Appl. No. 17/234,123.
Claims priority of application No. 109113927 (TW), filed on Apr. 24, 2020.
Prior Publication US 2021/0332834 A1, Oct. 28, 2021
Int. Cl. F04B 45/00 (2006.01); F04B 45/047 (2006.01); F16K 99/00 (2006.01)
CPC F16K 99/0015 (2013.01) [F04B 45/047 (2013.01)] 15 Claims
OG exemplary drawing
 
1. An actuating and sensing module comprising:
a bottom plate comprising a pressure relief orifice, a discharging orifice and a communication orifice;
a gas pressure sensor disposed on the bottom plate and sealing the communication orifice;
a thin gas transportation device disposed on the bottom plate and sealing the discharging orifice and the pressure relief orifice; and
a cover plate disposed on the bottom plate and covering the gas pressure sensor and the thin gas-transportation device, wherein the cover plate comprises an intake orifice;
wherein the thin gas transportation device is driven to inhale gas through the intake orifice, the gas is then discharged through the discharging orifice by the thin gas transportation device, and a pressure change of the gas is sensed by the gas pressure sensor.