US 11,946,140 B2
Hot showerhead
Anantha K. Subramani, Sunnyvale, CA (US); Seyyed Abdolreza Fazeli, Santa Clara, CA (US); Yang Guo, San Mateo, CA (US); Ramcharan Sundar, Bangalore (IN); Arun Kumar Kotrappa, Harihar (IN); Steven Mosbrucker, Santa Clara, CA (US); Steven D. Marcus, San Jose, CA (US); Xinhai Han, Santa Clara, CA (US); Kesong Hu, Pleasanton, CA (US); Tianyang Li, San Jose, CA (US); and Philip A. Kraus, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Mar. 26, 2021, as Appl. No. 17/213,908.
Prior Publication US 2022/0307131 A1, Sep. 29, 2022
Int. Cl. C23C 16/455 (2006.01); C23C 14/56 (2006.01); C23C 16/458 (2006.01); H01J 37/32 (2006.01)
CPC C23C 16/45565 (2013.01) [C23C 14/564 (2013.01); C23C 16/45536 (2013.01); C23C 16/4586 (2013.01); H01J 37/32082 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A substrate processing system comprising:
a chamber body defining a transfer region;
a first lid plate seated on the chamber body along a first surface of the first lid plate, wherein the first lid plate defines a plurality of apertures through the first lid plate;
a plurality of lid stacks, wherein a number of the plurality of lid stacks is equal to a number of apertures of the plurality of apertures defined through the first lid plate, wherein the plurality of lid stacks at least partially define a plurality of processing regions disposed above the transfer region;
a plurality of isolators, wherein an isolator of the plurality of isolators is positioned between each lid stack of the plurality of lid stacks and a corresponding aperture of the plurality of apertures;
a plurality of annular spacers, wherein an annular spacer of the plurality of annular spacers is positioned between each isolator of the plurality of isolators and a corresponding lid stack of the plurality of lids stacks; and
a plurality of manifolds, wherein a manifold of the plurality of manifolds is seated within an interior of each annular spacer of the plurality of annular spacers, wherein:
each annular spacer comprises a base portion and an upper portion that extends upward from the base portion;
the upper portion comprises an inner section and an outer section; and
the inner section comprises a downward-extending protrusion that contacts an upper surface of one of the plurality of manifolds.