US 11,946,139 B2
Atomic layer deposition of lithium boron comprising nanocomposite solid electrolytes
Anil U. Mane, Naperville, IL (US); Devika Choudhury, Naperville, IL (US); and Jeffrey W. Elam, Elmhurst, IL (US)
Assigned to UCHICAGO ARGONNE, LLC, Chicago, IL (US)
Filed by UCHICAGO ARGONNE, LLC, Chicago, IL (US)
Filed on Sep. 30, 2020, as Appl. No. 17/039,822.
Prior Publication US 2022/0098736 A1, Mar. 31, 2022
Int. Cl. C23C 16/455 (2006.01); C23C 16/38 (2006.01); C23C 16/44 (2006.01); H01M 10/0562 (2010.01)
CPC C23C 16/45555 (2013.01) [C23C 16/38 (2013.01); C23C 16/4408 (2013.01); C23C 16/45534 (2013.01); C23C 16/45553 (2013.01); H01M 10/0562 (2013.01); H01M 2300/0068 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method of forming a lithium boron coating comprising:
providing a substrate within an atomic layer deposition reactor; and
depositing a coating of lithium boron composite by an atomic layer deposition process including:
pulsing a lithium precursor comprising a lithium tertiary butoxide into the reactor;
purging the reactor of the lithium precursor;
pulsing a solution of a first boron precursor and a first co-reactant comprising an organic solvent;
purging the reactor of the first boron precursor and the first co-reactant; and
pulsing a solution of a second boron precursor, different from the first boron precursor, and a second co-reactant different from the first co-reactant;
wherein the second boron precursor comprises boron fluoride and the second co-reactant comprises at least one of HF or HF-pyridine, or the second boron precursor comprises boron sulfide and the second co-reactant comprises at least one of S or H2S.