US 11,945,070 B2
Rocker polishing apparatus and method for full-aperture deterministic polishing of a planar part
Ping Zhou, Liaoning (CN); Zhichao Geng, Liaoning (CN); Ying Yan, Liaoning (CN); Lin Wang, Liaoning (CN); Kai Wang, Liaoning (CN); and Dongming Guo, Liaoning (CN)
Assigned to DALIAN UNIVERSITY OF TECHNOLOGY, Liaoning (CN)
Appl. No. 17/289,718
Filed by DALIAN UNIVERSITY OF TECHNOLOGY, Liaoning (CN)
PCT Filed Apr. 17, 2020, PCT No. PCT/CN2020/085342
§ 371(c)(1), (2) Date Apr. 28, 2021,
PCT Pub. No. WO2021/184480, PCT Pub. Date Sep. 23, 2021.
Claims priority of application No. 202010202480.5 (CN), filed on Mar. 20, 2020.
Prior Publication US 2022/0305604 A1, Sep. 29, 2022
Int. Cl. B24B 1/00 (2006.01); B24B 29/02 (2006.01); B24B 41/04 (2006.01); B24B 49/12 (2006.01); B24B 55/06 (2006.01)
CPC B24B 1/00 (2013.01) [B24B 29/02 (2013.01); B24B 41/04 (2013.01); B24B 49/12 (2013.01); B24B 55/06 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A rocker polishing apparatus for full-aperture deterministic polishing of a planar part, comprising: a control system, a substrate (1), a lifting plate (6), a polishing module and a measuring module, wherein
the control system is configured to control a pose of a mechanical arm, a swing of a rocker (31), a movement of a guide rail slider, start of a laser displacement sensor (21), a rise and fall of the lifting plate (6), start of a motor (71) connected to a diamond dresser (74) and operation of a continuous polisher; a control panel of the control system is located at a side of the apparatus;
both the polishing module and the measuring module are located on the substrate (1); the lifting plate (6) is located between the polishing module and the measuring module;
the polishing module comprises a rocker mechanism (3), a polishing pad surface dressing mechanism (7), a polishing pad surface profile measuring apparatus (2) and a continuous polishing pad mechanism (8);
the rocker mechanism (3) comprises a stepping motor (33), an upright post (32) and the rocker (31); the upright post (32) is mounted on the substrate (1), a first end of the rocker (31) is hinged to the upright post (32), and a second end of the rocker (31) is suspended above the continuous polishing pad mechanism (8);
the polishing pad surface dressing mechanism (7) comprises a cylindrical shaft (73), a linear bearing (72), the motor (71) and the diamond dresser (74); and the cylindrical shaft (73) is fixed on a rear side of the rocker (31), the motor (71) is mounted on the cylindrical shaft (73) through the linear bearing (72), and the diamond dresser (74) is mounted on a rotating shaft of the motor (71) and located above a polishing pad (81);
the polishing pad surface profile measuring apparatus (2) comprises a linear guide rail (22) and the laser displacement sensor (21); and the linear guide rail (22) is fixed on a front side of the rocker (31), the laser displacement sensor (21) is slidably connected to the linear guide rail (22) through a slider, and the laser displacement sensor (21) is fixed below the slider;
the continuous polishing pad mechanism (8) comprises the polishing pad (81), a fixing bolt (82), a driven wheel (83), a shift fork (84), a driving wheel motor (85), a fixing frame (86), a driving wheel (87) and a turntable (89); and the turntable (89) is mounted on a spindle of the continuous polisher by the fixing bolt (82); the polishing pad (81) is adhered on the turntable (89); the fixing frame (86) is mounted on the substrate (1) by a bolt; the driving wheel motor (85) is mounted on a sidewall of the fixing frame (86); the shift fork (84) is mounted on the sidewall of the fixing frame (86) and located below the driving wheel motor (85); and the driven wheel (83) and the driving wheel (87) are respectively mounted on two ends of the shift fork (84) and suspended above the polishing pad (81);
the measuring module comprises a planar part surface profile automatic measuring apparatus (5) and a mechanical arm (4); the planar part surface profile automatic measuring apparatus (5) comprises a washing station (53), a drying station (52) and a measuring station (51);
the washing station (53), the drying station (52) and the measuring station (51) are sequentially mounted on the substrate (1); and a base of the mechanical arm mechanism (4) is fixed on a sidewall of the whole apparatus and located above the drying station (52);
the stepping motor (33) controls, through the control system, an angle and a speed that the rocker (31) rotates along the upright post (32);
the polishing pad surface profile measuring apparatus (2) is driven by the rocker (31) to a position where a measurement locus of the laser displacement sensor (21) passes through a centre of the polishing pad (81), and a pose of the laser displacement sensor (21) and a height towards the polishing pad (81) are adjustable, and the laser displacement sensor (21) is controlled to move along the linear guide rail (22); and
the polishing pad surface dressing mechanism (7) is connected to the rocker (31) by the linear bearing (72); in a process of dressing the polishing pad (81), the diamond dresser (74) is contacted with a surface of the polishing pad (81) at a constant pressure through self-weight and a weight of the motor (71), and dressing times of the diamond dresser (74) at different radial positions of the polishing pad (81) is controlled by controlling a swing speed of the rocker (31), thereby implementing deterministic dressing of the polishing pad (81).