US 11,944,412 B2
Blood pressure detection device
Hao-Jan Mou, Hsinchu (TW); Ying-Lun Chang, Hsinchu (TW); Ching-Sung Lin, Hsinchu (TW); Chi-Feng Huang, Hsinchu (TW); Yung-Lung Han, Hsinchu (TW); Chang-Yen Tsai, Hsinchu (TW); Wei-Ming Lee, Hsinchu (TW); Chun-Yi Kuo, Hsinchu (TW); and Tsung-I Lin, Hsinchu (TW)
Assigned to MICROJET TECHNOLOGY CO., LTD., Hsinchu (TW)
Filed by Microjet Technology Co., Ltd., Hsinchu (TW)
Filed on Jun. 2, 2021, as Appl. No. 17/336,725.
Claims priority of application No. 109118985 (TW), filed on Jun. 5, 2020.
Prior Publication US 2021/0378530 A1, Dec. 9, 2021
Int. Cl. A61B 5/021 (2006.01); B81B 3/00 (2006.01)
CPC A61B 5/02133 (2013.01) [B81B 3/0021 (2013.01); A61B 2560/0214 (2013.01); A61B 2562/028 (2013.01); B81B 2201/054 (2013.01); B81B 2203/0127 (2013.01); B81B 2207/012 (2013.01)] 8 Claims
OG exemplary drawing
 
1. A blood pressure detection device comprising:
a substrate comprising a microelectromechanical-element region, a gas-pressure-sensing region and a driving-element region, wherein at least one inlet aperture is formed in the microelectromechanical-element region by an etching process;
a microelectromechanical element manufactured by a semiconductor process is stacked and integrally formed on the microelectromechanical-element region of the substrate, and corresponds to the at least one inlet aperture to actuate transportation of gas;
a gas-pressure-sensing element manufactured by a semiconductor process is stacked and integrally formed on the gas-pressure-sensing region of the substrate, so as to detect a gas pressure and output a detection datum of blood pressure;
a driving-chip element manufactured by a semiconductor process is stacked and integrally formed on the driving-element region, wherein the driving-chip element is electrically connected to the microelectromechanical element and the gas-pressure-sensing element, and comprises a microprocessor;
an encapsulation layer positioned on the substrate and configured to encapsulate at least the microelectromechanical element and the gas-pressure-sensing element, wherein a flowing-channel space is formed above the microelectromechanical element and the gas-pressure-sensing element, an outlet aperture is manufactured in the encapsulation layer by an etching process, and the outlet aperture is in fluid communication with an airbag; and
a valve layer formed and stacked on a bottom of the substrate by a deposition process, wherein a valve unit is formed in the valve layer by an etching process at a position corresponding to the at least one inlet aperture of the substrate, and the valve unit is controlled by the microprocessor of the driving-chip element to be opened or closed;
wherein the microprocessor of the driving-chip element controls driving operations of the microelectromechanical element, the gas-pressure sensing element and the valve unit, respectively, wherein when the valve unit is opened and the microelectromechanical element is enabled to actuate the transportation of the gas, the gas is introduced into the flowing-channel space through the at least one inlet aperture of the substrate, flows through the outlet aperture of the encapsulation layer, and is transported into and inflates the airbag for carrying out blood pressure measurement, and the detection datum of blood pressure outputted by the gas-pressure-sensing element is transmitted to the microprocessor.