US 12,268,010 B2
Memory device and method for manufacturing the same
Erh-Kun Lai, Longling Shiang (TW); Hsiang-Lan Lung, Kaohsiung (TW); and Chih-Hsiang Yang, New Taipei (TW)
Assigned to MACRONIX INTERNATIONAL CO., LTD., Hsinchu (TW)
Filed by MACRONIX INTERNATIONAL CO., LTD., Hsinchu (TW)
Filed on Mar. 18, 2022, as Appl. No. 17/698,110.
Prior Publication US 2023/0301117 A1, Sep. 21, 2023
Int. Cl. H01L 29/06 (2006.01); H10B 63/00 (2023.01); H10N 70/00 (2023.01); H10N 70/20 (2023.01)
CPC H10B 63/84 (2023.02) [H10B 63/24 (2023.02); H10N 70/063 (2023.02); H10N 70/231 (2023.02)] 10 Claims
OG exemplary drawing
 
1. A memory device, comprising:
a substrate;
a first conductive stripe disposed on the substrate and extending along a first direction;
a second conductive stripe disposed on the first conductive stripe and extending along a second direction, wherein the first direction and the second direction are parallel to an upper surface of the substrate, and the second direction is intersected with the first direction, a thickness of the second conductive stripe is greater than a thickness of the first conductive stripe, and the second conductive stripe is an integral structure;
a first pillar element disposed at an intersection between the first conductive stripe and the second conductive stripe, and extending from a top surface of the first conductive stripe to a bottom surface of the second conductive stripe along a third direction, wherein the third direction is intersected with the first direction and the second direction, wherein the first pillar element comprises a switching layer and a memory layer corresponding to a first level; and
a spacer surrounding and directly contacting the first pillar element,
wherein the second conductive stripe has a same width in the first direction, and the spacer further surrounds the second conductive stripe to have a same width in the first direction.