US 12,267,919 B2
Ceramic heater and method of manufacturing the same
Kazuhiro Nobori, Nagoya (JP); Takuji Kimura, Nagoya (JP); and Shuichiro Motoyama, Nagoya (JP)
Assigned to NGK INSULATORS, LTD., Nagoya (JP)
Filed by NGK INSULATORS, LTD., Nagoya (JP)
Filed on Aug. 10, 2021, as Appl. No. 17/444,753.
Application 17/444,753 is a continuation of application No. PCT/JP2020/009002, filed on Mar. 3, 2020.
Claims priority of application No. 2019-050231 (JP), filed on Mar. 18, 2019.
Prior Publication US 2021/0378061 A1, Dec. 2, 2021
Int. Cl. H05B 3/28 (2006.01); C04B 35/64 (2006.01); H01L 21/02 (2006.01); H01L 21/683 (2006.01); H05B 3/06 (2006.01); H05B 3/16 (2006.01); H05B 3/18 (2006.01)
CPC H05B 3/283 (2013.01) [C04B 35/64 (2013.01); H01L 21/02 (2013.01); H01L 21/683 (2013.01); H05B 3/06 (2013.01); H05B 3/16 (2013.01); H05B 3/18 (2013.01); H05B 2203/017 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A ceramic heater comprising:
a ceramic plate which is provided with a wafer placement surface on an upper surface and in which a heating resistor is internally embedded;
a ceramic tubular shaft with an upper end bonded to a lower surface of the plate; and
a power feeding member which penetrates a peripheral wall part of the tubular shaft in a vertical direction, and is electrically connected to the heating resistor,
wherein the power feeding member is embedded in the peripheral wall part of the tubular shaft, and is in tight contact with a ceramic material of the tubular shaft, and
wherein the heating resistor is electrically connected through a cylindrical connection terminal to the power feeding member and a lower end surface of the cylindrical connection terminal is flush with the lower surface of the plate.