| CPC H04R 19/04 (2013.01) [H04R 7/14 (2013.01); H04R 2201/003 (2013.01)] | 9 Claims |

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1. A MEMS microphone, comprising:
a substrate with a back cavity, and
a capacitive system located on the substrate, comprising a back plate and a diaphragm opposite to the back plate, wherein
the back plate comprises a body portion, a fixing portion connected with the body portion and the substrate, and a plurality of strip reinforcing ribs, the reinforcing ribs are protruded from the body portion, each of the reinforcing ribs is connected with two edges of the body portion, the two edges are opposite to each other.
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