US 12,267,060 B2
Resonance device
Yoshihisa Inoue, Nagaokakyo (JP); Ville Kaajakari, Helsinki (FI); and Ryota Kawai, Nagaokakyo (JP)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Oct. 4, 2021, as Appl. No. 17/493,037.
Application 17/493,037 is a continuation of application No. PCT/JP2020/003845, filed on Feb. 3, 2020.
Claims priority of provisional application 62/866,824, filed on Jun. 26, 2019.
Prior Publication US 2022/0029598 A1, Jan. 27, 2022
Int. Cl. H03H 9/02 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01); H03H 9/24 (2006.01)
CPC H03H 9/02448 (2013.01) [H03H 9/0595 (2013.01); H03H 9/1057 (2013.01); H03H 9/2489 (2013.01); H03H 2009/0248 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A resonance device comprising:
a resonator including:
a base,
a vibrating arm extending from a first end of the base in a first direction,
a frame disposed around at least a part of the vibrating arm and configuring the vibrating arm to vibrate, and
a support arm connecting the base to the frame; and
a first substrate including:
a first recess defining at least a part of a vibration space for the resonator, and
a first limiting portion disposed away from the support arm by a first distance in a thickness direction of the first substrate, with the first distance being smaller than a distance between a bottom surface of the first recess and the vibrating arm in the thickness direction of the first substrate,
wherein the first limiting portion is disposed at a position so as to overlap at least a portion of the support arm in a plan view.