US 12,267,001 B2
High-voltage power supply device
Haruki Osa, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Filed by SHIMADZU CORPORATION, Kyoto (JP)
Filed on Jul. 19, 2022, as Appl. No. 17/868,129.
Claims priority of application No. 2021-145858 (JP), filed on Sep. 8, 2021.
Prior Publication US 2023/0073162 A1, Mar. 9, 2023
Int. Cl. H02M 1/08 (2006.01); H02M 1/00 (2006.01); H02M 5/458 (2006.01); H02M 11/00 (2006.01); H01J 49/02 (2006.01)
CPC H02M 1/08 (2013.01) [H02M 1/0029 (2021.05); H02M 5/458 (2013.01); H01J 49/022 (2013.01); H02M 11/00 (2013.01)] 5 Claims
OG exemplary drawing
 
1. A high-voltage power supply device capable of outputting a high voltage of a positive polarity or a negative polarity in a switchable manner, comprising:
a first voltage generation unit configured to output the high voltage of the positive polarity;
a second voltage generation unit configured to output the high voltage of the negative polarity;
a first discharging diode connected to a voltage output end of the first voltage generation unit such that when a high voltage is outputted to the voltage output end of the first voltage generation unit, the high voltage is applied to the first discharging diode in a reverse biased state;
a second discharging diode connected to a voltage output end of the second voltage generation unit such that when a high voltage is outputted to the voltage output end of the second voltage generation unit, the high voltage is applied to the second discharge diode in a reverse biased state;
a first output circuit connected between the voltage output end of the first voltage generation unit and a polarity switching voltage output end which is common to both the positive polarity and the negative polarity, the first output circuit being configured by a first switch and a protective resistor connected in series to each other, the first switch being configured by a voltage-controlled semiconductor switch;
a second output circuit connected between the voltage output end of the second voltage generation unit and the polarity switching voltage output end, the second output circuit being configured by a second switch and a protective resistor connected in series to each other, the second switch being configured by a voltage-controlled semiconductor switch;
an output capacitor connected in parallel to a load that is to be connected to the polarity switching voltage output end;
a controller configured to control operations of the first voltage generation unit and the second voltage generation unit and opening/closing operations of the first switch and the second switch such that both the first voltage generation unit and the second voltage generation unit are turned on once in a state in which both the operations of the first voltage generation unit and the second voltage generation unit are stopped, when switching a polarity of a voltage outputted from the polarity switching voltage output end;
a first limitation unit configured to limit a time rate of change of a voltage between both ends of the first switch when the controller turns on the first switch; and
a second limitation unit configured to limit a time rate of change of a voltage between both ends of the second switch when the controller turns on the second switch.