	US 12,266,752 B2
	Modification of lithium ion electrode materials via atomic layer deposition techniques
Anil U. Mane, Naperville, IL (US); Jason R. Croy, Plainfield, IL (US); Jeffrey W. Elam, Elmhurst, IL (US); Arturo Gutierrez, Naperville, IL (US); Jihyeon Gim, Naperville, IL (US); Devika Choudhury, Naperville, IL (US); Eungje Lee, Naperville, IL (US); and Hakim Iddir, Elmhurst, IL (US)
Assigned to UCHICAGO ARGONNE, LLC, Chicago, IL (US)
Filed by UCHICAGO ARGONNE, LLC, Chicago, IL (US)
Filed on Apr. 22, 2020, as Appl. No. 16/855,676.
Prior Publication US 2021/0336240 A1, Oct. 28, 2021
Int. Cl. H01M 4/04 (2006.01); C23C 16/455 (2006.01); H01M 4/02 (2006.01); H01M 4/36 (2006.01); H01M 4/48 (2010.01); H01M 4/525 (2010.01); H01M 10/0525 (2010.01)

CPC H01M 4/0428 (2013.01) [C23C 16/45555 (2013.01); H01M 4/366 (2013.01); H01M 4/483 (2013.01); H01M 4/525 (2013.01); H01M 10/0525 (2013.01); H01M 2004/028 (2013.01)]

12 Claims

1. A method of modifying a cathode comprising:

providing a lithium carbonate or lithium hydroxide cathode precursor in a reactor; and

depositing on the cathode precursor a first material by atomic layer deposition process including at least one cycle of:

pulsing a first metal precursor into the reactor for a first metal precursor pulse time;

exposing the cathode precursor to the first metal precursor for a first metal precursor exposure time and at a first partial pressure and binding the first metal precursor;

purging the reactor of the first metal precursor;

pulsing a co-reactant precursor into the reactor for a first co-reactant pulse time;

exposing the cathode precursor to the co-reactant precursor for a co-reactant precursor exposure time and at a second partial pressure, the co-reactant precursor reacting with the bound first metal precursor therein to form the first material; and

purging the reactor of the co-reactant precursor;

wherein the cathode precursor prior to deposition is non-calcinated and non-lithiated.