US 12,266,741 B2
Light emitting element, method of manufacturing the same, and display device including the light emitting element
Jun Bo Sim, Yongin-si (KR); Chang Hee Lee, Yongin-si (KR); Yun Hyuk Ko, Yongin-si (KR); Sang Ho Jeon, Yongin-si (KR); and Jae Kook Ha, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed on Apr. 15, 2024, as Appl. No. 18/636,248.
Application 18/636,248 is a division of application No. 17/350,949, filed on Jun. 17, 2021, granted, now 11,961,945.
Claims priority of application No. 10-2020-0155887 (KR), filed on Nov. 19, 2020.
Prior Publication US 2024/0266475 A1, Aug. 8, 2024
Int. Cl. H01L 25/075 (2006.01); H01L 25/16 (2023.01); H01L 33/00 (2010.01); H01L 33/44 (2010.01); H01L 33/62 (2010.01)
CPC H01L 33/44 (2013.01) [H01L 25/0753 (2013.01); H01L 25/167 (2013.01); H01L 33/007 (2013.01); H01L 33/0075 (2013.01); H01L 33/0093 (2020.05); H01L 33/62 (2013.01); H01L 2933/0025 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A method of manufacturing a light emitting element, the method comprising:
forming a light emitting stack structure by sequentially stacking a first semiconductor layer, an active layer, a second semiconductor layer, and an additional electrode on a substrate;
forming at least one light emitting stack pattern by etching the light emitting stack structure in a vertical direction, and exposing one region of the first semiconductor layer to the outside;
coating an insulating material layer made of a zinc acetate solution on the light emitting stack pattern by using a wet chemical process and drying the coated insulating material layer;
forming an insulating film surrounding an outer surface of the light emitting stack pattern by etching the dried insulating material layer in the vertical direction; and
forming the light emitting element by separating the light emitting stack pattern surrounded by the insulating film from the substrate.