| CPC H01L 23/5226 (2013.01) [H01L 23/528 (2013.01); H01L 23/53257 (2013.01); H01L 23/552 (2013.01); H01L 23/66 (2013.01); H01L 2223/6616 (2013.01)] | 22 Claims |

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1. A semiconductor device comprising:
an epitaxial layer having a first-type dopant;
a first well having a second-type dopant;
a base layer having the second-type dopant, the base layer formed within the epitaxial layer and in contact with the first well;
a first metal layer comprising a first base terminal and an inner conductor;
a first via connecting the first base terminal to the first well;
an isolation layer on the epitaxial layer;
a polysilicon region on the isolation layer; and
a second via connecting the first base terminal to the polysilicon region,
wherein at least one dielectric separates the inner conductor from the first base terminal, and the base layer.
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