US 12,266,582 B2
Hermetic package for high CTE mismatch
Dylan Murdock, Bend, OR (US)
Assigned to Qorvo US, Inc., Greensboro, NC (US)
Filed by Qorvo US, Inc., Greensboro, NC (US)
Filed on Aug. 4, 2021, as Appl. No. 17/394,083.
Claims priority of provisional application 63/060,766, filed on Aug. 4, 2020.
Prior Publication US 2022/0044979 A1, Feb. 10, 2022
Int. Cl. H01L 23/31 (2006.01); H01L 23/04 (2006.01); H01L 23/10 (2006.01); H01L 23/29 (2006.01); H01L 23/48 (2006.01); H01L 23/00 (2006.01); H01L 23/373 (2006.01)
CPC H01L 23/3142 (2013.01) [H01L 23/04 (2013.01); H01L 23/10 (2013.01); H01L 23/291 (2013.01); H01L 23/315 (2013.01); H01L 23/481 (2013.01); H01L 23/3736 (2013.01); H01L 24/48 (2013.01); H01L 24/49 (2013.01); H01L 2224/48225 (2013.01); H01L 2224/49176 (2013.01); H01L 2924/01042 (2013.01); H01L 2924/01074 (2013.01); H01L 2924/0132 (2013.01); H01L 2924/01403 (2013.01); H01L 2924/05432 (2013.01); H01L 2924/15153 (2013.01); H01L 2924/1517 (2013.01); H01L 2924/15747 (2013.01); H01L 2924/15763 (2013.01); H01L 2924/15787 (2013.01); H01L 2924/16747 (2013.01); H01L 2924/1676 (2013.01); H01L 2924/173 (2013.01); H01L 2924/17747 (2013.01); H01L 2924/1776 (2013.01); H01L 2924/3512 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A package comprising:
a metal base having a top surface; and
multiple ceramic wall segments discrete from each other and having no overlap in a horizontal plane, wherein:
a gap exists between every two adjacent ceramic wall segments and is sealed with a connecting material, wherein the ceramic wall segments and the connecting material are formed of different materials;
each of the ceramic wall segments and the connecting material form a ring wall, wherein the gap between every two adjacent ceramic wall segments is located at a corner of the ring wall;
the metal base has a coefficient of thermal expansion (CTE)>11 μm/m·K, and each ceramic wall segment has a CTE<9 μm/m·K; and
the metal base is surrounded by the ring wall, wherein each side surface of the metal base is fully covered by the ring wall, and at least a portion of the top surface of the metal base is exposed through the ring wall.