US 12,266,556 B2
Methods of adjusting a tilt between a bonding tool assembly and a support structure assembly of a bonding system
Matthew Tarabulski, Fort Washington, PA (US)
Assigned to Kulicke and Soffa Industries, Inc., Fort Washington, PA (US)
Filed by Kulicke and Soffa Industries, Inc., Fort Washington, PA (US)
Filed on Apr. 6, 2023, as Appl. No. 18/131,431.
Claims priority of provisional application 63/330,170, filed on Apr. 12, 2022.
Prior Publication US 2023/0326778 A1, Oct. 12, 2023
Int. Cl. B23K 20/02 (2006.01); G05B 19/402 (2006.01); H01L 21/67 (2006.01); H01L 21/68 (2006.01); H01L 21/683 (2006.01)
CPC H01L 21/68 (2013.01) [G05B 19/402 (2013.01); H01L 21/67144 (2013.01); H01L 21/6838 (2013.01); G05B 2219/49191 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A method of adjusting a tilt between a bonding tool assembly and a support structure assembly of a bonding system, the method comprising the steps of:
(a) bringing a bonding tool assembly of a bonding system into contact with a support structure assembly of the bonding system;
(b) sensing a vacuum leakage at an interface between the bonding tool assembly and the support structure assembly;
(c) adjusting a tilt of at least one of (i) the bonding tool assembly and (ii) the support structure assembly in response to the vacuum leakage sensed in step (b) until an acceptable level of vacuum leakage is sensed;
(d) moving the bonding tool assembly to an alignment height after step (c); and
(e) determining a tilt change caused by moving the bonding tool assembly to the alignment height.