US 12,266,554 B2
Substrate processing apparatus
Jairo T. Moura, Marlborough, MA (US); and Roumen Botev, Groton, MA (US)
Assigned to Brooks Automation US, LLC, Clemsford (MA)
Filed by Brooks Automation US, LLC, Chelmsford, MA (US)
Filed on Jan. 2, 2024, as Appl. No. 18/402,317.
Application 18/402,317 is a continuation of application No. 18/047,532, filed on Oct. 18, 2022, granted, now 11,862,498.
Application 18/047,532 is a continuation of application No. 17/180,298, filed on Feb. 19, 2021, granted, now 11,476,139, issued on Oct. 18, 2022.
Claims priority of provisional application 62/979,195, filed on Feb. 20, 2020.
Prior Publication US 2024/0145286 A1, May 2, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H01L 21/677 (2006.01); B65G 35/06 (2006.01); B65G 54/02 (2006.01); G05D 3/12 (2006.01); H02K 41/025 (2006.01); H02N 15/00 (2006.01)
CPC H01L 21/67709 (2013.01) [B65G 35/06 (2013.01); B65G 54/02 (2013.01); G05D 3/125 (2013.01); H02K 41/025 (2013.01); H02N 15/00 (2013.01); H02K 2201/18 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A linear electrical machine comprising:
a frame with a level reference plane;
an array of electromagnets, connected to the frame to form a drive plane at a predetermined height relative to the level reference plane, the array of electromagnets being arranged so that a series of electromagnets of the array of electromagnets define at least one drive line within the drive plane, and each of the electromagnets being coupled to an alternating current power source energizing each electromagnet;
at least one reaction platen of paramagnetic, diamagnetic, or non-magnetic conductive material disposed to cooperate with the electromagnets of the array of electromagnets so that excitation of the electromagnets with alternating current generates levitation and propulsion forces against the reaction platen that controllably levitate and propel the reaction platen along the at least one drive line, in a controlled attitude relative to the drive plane; and
a controller operably coupled to the array of electromagnets and the alternating current power source and configured so as to sequentially excite the electromagnets with multiphase alternating current that describe more than one degrees of freedom control of each reaction platen that is at least one of levitated and propelled with at least one of steady and controllable variable attitude control by a common set of the electromagnets, each of which generates, from excitation with common multiphase alternating current having a single common frequency per phase, both the levitation and the propulsion forces against the reaction platen effecting more than one degrees of freedom control of the reaction platen.