| CPC H01J 37/32715 (2013.01) [C23C 14/35 (2013.01); H01J 37/32055 (2013.01); H01J 37/32733 (2013.01); H01J 37/32761 (2013.01); H01J 37/32779 (2013.01); H01J 37/3405 (2013.01); H01J 37/3417 (2013.01); H01J 37/32816 (2013.01); H01J 2237/182 (2013.01); H01J 2237/20214 (2013.01); H01J 2237/335 (2013.01)] | 17 Claims |
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1. A method for sputtering and depositing metal on a surface of magnetic powder materials, comprising the following steps:
after loading a magnetic powder material into a sample roller of a device for sputtering and depositing metal on the surface of magnetic powder materials, vacuumizing a vacuum chamber;
wherein the device further comprises a vacuum chamber, a vacuum pump set, a magnetron sputtering target, a cathode ion source, and a water-cooled anode, and wherein the sample roller is arranged in the vacuum chamber, an axis of the sample roller is arranged in a horizontal direction, and the sample roller is able to rotate around the axis, wherein the sample roller has two ends both of which are open, and the sample roller comprises a power device capable of driving the sample roller to rotate,
wherein the cathode ion source and the magnetron sputtering target each extend inwards into the sample roller from a first opening in a first of the two ends of the sample roller, and
wherein the water-cooled anode extends inwards into the sample roller from a second the opening in a second end of the two ends of the sample roller;
keeping the sample roller rotating;
after introducing inertia gas into the vacuum chamber, cleaning the magnetic powder material by using an arc plasma column formed by a cathode ion source and a supported water-cooled anode to obtain the surface-purified magnetic powder material in the sample roller; and
carrying out, by using the magnetron sputtering target, magnetron sputtering on the rotating purified magnetic powder material for metal deposition;
wherein the magnetic powder material reciprocates along the inner circumferential surface of the sample roller along with the rotation of the sample roller, and the maximum circle center of the reciprocating motion of the magnetic powder is less than 90°.
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