CPC H01J 37/32568 (2013.01) [H01J 37/3233 (2013.01); H01J 37/3244 (2013.01); H01J 37/3255 (2013.01); H01J 37/32733 (2013.01)] | 20 Claims |
1. A plasma treatment device, comprising:
a first electrode;
a dielectric body supportive of the first electrode; and
a second mesh electrode having an opposite polarity as the first electrode and comprising a seating portion, wherein:
the second mesh electrode is proximate to the dielectric body to define a gap receptive of particles for collection in the seating portion,
the gap is sized such that, with the second mesh electrode activated, a plasma field is generated to treat the particles in the seating portion, and
the seating portion is configured to retain the particles during treatment in opposition to ionic winds resulting from the plasma field.
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