	US 12,266,509 B2
	Multilayer coatings of component parts for a work piece processing chamber
Paul Konkola, West Linn, OR (US); Ramesh Chandrasekharan, Portland, OR (US); Andrew H. Breninger, Hillsboro, OR (US); and Tony Shaleen Kaushal, Campbell, CA (US)
Assigned to LAM RESEARH CORPORATION, Fremont, CA (US)
Appl. No. 17/311,639
Filed by LAM RESEARCH CORPORATION, Fremont, CA (US)
PCT Filed Nov. 13, 2019, PCT No. PCT/US2019/061233 § 371(c)(1), (2) Date Jun. 7, 2021, PCT Pub. No. WO2020/123082, PCT Pub. Date Jun. 18, 2020.
Claims priority of provisional application 62/779,113, filed on Dec. 13, 2018.
Prior Publication US 2022/0028662 A1, Jan. 27, 2022
Int. Cl. C23C 16/02 (2006.01); C23C 16/40 (2006.01); C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 28/00 (2006.01); C25D 3/44 (2006.01); H01J 37/32 (2006.01)

CPC H01J 37/32495 (2013.01) [C23C 16/0281 (2013.01); C23C 16/403 (2013.01); C23C 16/4404 (2013.01); C23C 16/45544 (2013.01); C23C 28/32 (2013.01); C23C 28/345 (2013.01); C25D 3/44 (2013.01); H01J 37/32477 (2013.01); Y10T 428/12667 (2015.01); Y10T 428/12736 (2015.01)]

20 Claims

1. A processing tool comprising a processing chamber for processing a work piece, the processing chamber including at least one component part subject to mechanical stress having a multi-layer coating including (a) an aluminum mechanical protection layer formed on the at least one component part, the aluminum mechanical protection layer comprising a thickness of 25 microns or greater, and (b) a deposited ceramic coating formed on the aluminum mechanical protection layer, wherein the deposited ceramic coating has a thickness of 10 microns or less, wherein the deposited the ceramic coating comprises yttrium oxide and is protective against fluorine, and wherein the at least one component part is made from an iron-containing alloy.