US 12,266,502 B2
Sample milling apparatus and method of adjustment therefor
Munehiro Kozuka, Tokyo (JP)
Assigned to JEOL Ltd., Tokyo (JP)
Filed by JEOL Ltd., Tokyo (JP)
Filed on Mar. 1, 2022, as Appl. No. 17/683,538.
Claims priority of application No. 2021-036229 (JP), filed on Mar. 8, 2021.
Prior Publication US 2022/0285125 A1, Sep. 8, 2022
Int. Cl. H01J 37/304 (2006.01); H01J 37/20 (2006.01); H01J 37/31 (2006.01)
CPC H01J 37/304 (2013.01) [H01J 37/20 (2013.01); H01J 37/31 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method of adjustment for use in a sample milling apparatus, the method comprising:
observing, with a positioning camera of the sample milling apparatus, a trace of an impinging ion beam emitted from an ion source of the sample milling apparatus at a sample, while the positioning camera is positionally held relative to a swing axis of a swinging mechanism of the sample milling apparatus that is configured to swing the sample, to obtain an observation image; and
extracting a display image to be displayed on a display section of the sample milling apparatus from the observation image based on a position of the trace of the impinging ion beam to thereby bring an impact point of the impinging ion beam and a position of a field of view of the display image into coincidence with each other.