US 12,266,501 B2
Nanopositioning systems and associated methods
ChaBum Lee, College Station, TX (US)
Assigned to The Texas A&M University System, College Station, TX (US)
Appl. No. 17/780,422
Filed by The Texas A&M University System, College Station, TX (US)
PCT Filed Nov. 27, 2020, PCT No. PCT/US2020/062508
§ 371(c)(1), (2) Date May 26, 2022,
PCT Pub. No. WO2021/108770, PCT Pub. Date Jun. 3, 2021.
Claims priority of provisional application 63/053,184, filed on Jul. 17, 2020.
Claims priority of provisional application 62/941,339, filed on Nov. 27, 2019.
Prior Publication US 2023/0009873 A1, Jan. 12, 2023
Int. Cl. G01Q 10/04 (2010.01); F16M 11/04 (2006.01); F16M 11/18 (2006.01); F16M 11/22 (2006.01); G03F 7/00 (2006.01); H01J 37/20 (2006.01); H01J 37/26 (2006.01)
CPC H01J 37/20 (2013.01) [F16M 11/043 (2013.01); F16M 11/18 (2013.01); F16M 11/22 (2013.01); G01Q 10/04 (2013.01); G03F 7/70758 (2013.01); H01J 37/26 (2013.01); H01J 2237/20221 (2013.01)] 12 Claims
OG exemplary drawing
 
1. A nanoscale positioning system for positioning a positionable component, comprising:
a motion platform comprising a first end, a second end, a shuttle positioned between the first end and the second end and configured to support the positionable component, a flexure member, and a fluid passage extending through the flexure member from the first end to the second end of the motion platform; and
a pressure controller coupled to the motion platform and fluidically connected to the fluid passage, wherein the pressure controller is configured to selectably provide a fluid pressure in the fluid passage to flex the flexure member whereby the shuttle is displaced along a motion axis of the motion platform.