US 12,265,774 B2
Boundary cell
Yu-Jung Chang, Hsinchu (TW); Min-Yuan Tsai, Hsinchu (TW); and Wen-Ju Yang, Hsinchu (TW)
Assigned to Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed by Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu (TW)
Filed on Jun. 8, 2023, as Appl. No. 18/331,576.
Application 18/331,576 is a continuation of application No. 17/373,124, filed on Jul. 12, 2021, granted, now 11,709,986, issued on Jul. 25, 2023.
Application 17/373,124 is a continuation of application No. 16/577,432, filed on Sep. 20, 2019, granted, now 11,062,074, issued on Jul. 13, 2021.
Claims priority of provisional application 62/848,290, filed on May 15, 2019.
Prior Publication US 2023/0315968 A1, Oct. 5, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. G06F 30/392 (2020.01); H01L 27/02 (2006.01)
CPC G06F 30/392 (2020.01) 20 Claims
OG exemplary drawing
 
1. A method, comprising:
determining a first boundary of a first functional cell of a circuit;
placing a first plurality of dummy cells along first portions of the first boundary extending in a first direction around the first functional cell;
placing a second plurality of dummy cells along second portions of the first boundary extending in a second direction around the first functional cell;
placing one or more dummy cells along one or more remaining portions of the first boundary not covered by the first plurality of dummy cells and the second plurality of dummy cells forming a first ring of dummy cells around the first functional cell;
determining a second boundary around a second functional cell of the circuit, wherein the first boundary and the second boundary share a common portion; and
forming a second ring of dummy cells around the second functional cell, the second ring of dummy cells comprising the common portion.