| CPC G05B 19/4155 (2013.01) [G06N 20/00 (2019.01); G05B 2219/31368 (2013.01); G05B 2219/45031 (2013.01)] | 17 Claims |
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1. A tool cluster for substrate processing, comprising:
one or more transfer chambers;
a plurality of process chambers connected to the one or more transfer chambers, the plurality of process chambers comprising a first process chamber comprising a first plurality of sensors and a second process chamber comprising a second plurality of sensors; and
a computing device at the tool cluster, wherein the computing device is to:
receive a first set of measurements from at least one of the first plurality of sensors of the first process chamber during or after a first instance of a process performed within the first process chamber, wherein the first set of measurements comprise optical measurements, power measurements, and pressure measurements;
process the first set of measurements using a trained machine learning model, wherein the trained machine learning model is to generate a first output based on processing of the first set of measurements;
cause a first action to be performed with respect to the first process chamber based on the first output of the trained machine learning model;
determine a first result of the first action; and
update a training of the trained machine learning model based on the first set of measurements, the first output, and the first result of the first action.
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