US 12,265,333 B2
Composition, resist underlayer film, method of forming resist underlayer film, method of producing patterned substrate, and compound
Shin-ya Nakafuji, Tokyo (JP); Tomoaki Taniguchi, Tokyo (JP); and Kazunori Takanashi, Tokyo (JP)
Assigned to JSR CORPORATION, Tokyo (JP)
Filed by JSR CORPORATION, Tokyo (JP)
Filed on Sep. 23, 2021, as Appl. No. 17/482,557.
Application 17/482,557 is a continuation of application No. PCT/JP2020/014140, filed on Mar. 27, 2020.
Claims priority of application No. 2019-063609 (JP), filed on Mar. 28, 2019.
Prior Publication US 2022/0011672 A1, Jan. 13, 2022
Int. Cl. G03F 7/11 (2006.01); C07C 39/21 (2006.01); C07C 39/225 (2006.01); C07C 211/54 (2006.01); C07D 207/323 (2006.01); C07D 307/36 (2006.01); C08G 8/10 (2006.01); C09D 161/06 (2006.01)
CPC G03F 7/11 (2013.01) [C07C 39/21 (2013.01); C07C 39/225 (2013.01); C07C 211/54 (2013.01); C07D 207/323 (2013.01); C07D 307/36 (2013.01); C08G 8/10 (2013.01); C09D 161/06 (2013.01); C07C 2603/18 (2017.05); C07C 2603/26 (2017.05); C07C 2603/50 (2017.05)] 16 Claims
OG exemplary drawing
 
1. A composition comprising:
a compound represented by formula (2); and
a solvent,

OG Complex Work Unit Chemistry
wherein, in the formula (1), R1 and R2 each independently represent a substituted or unsubstituted aryl group having 6 to 30 ring atoms or a substituted or unsubstituted heteroaryl group having 5 to 30 ring atoms; at least one of R1 and R2 represents a substituted or unsubstituted naphthyl group, a substituted or unsubstituted anthryl group, a substituted or unsubstituted fluorenyl group, a substituted or unsubstituted phenanthryl group, a substituted or unsubstituted phenalenyl group, a substituted or unsubstituted pyrenyl group, a substituted or unsubstituted chrysenyl group, a substituted or unsubstituted triphenylenyl group, a substituted or unsubstituted tetracenyl group, a substituted or unsubstituted perylenyl group, a substituted or unsubstituted picenyl group, a substituted or unsubstituted pentacenyl group, a substituted or unsubstituted hexacenyl group, a substituted or unsubstituted coronenyl group, a substituted or unsubstituted trinaphthylenyl group, a substituted or unsubstituted heptacenyl group, or a substituted or unsubstituted heteroaryl group having 5 to 30 ring atoms; R3 represents a hydrogen atom or a substituted or unsubstituted monovalent aliphatic hydrocarbon group having 1 to 10 carbon atoms; n is an integer of 2 to 10, wherein a plurality of R1s are identical or different from each other, a plurality of R2s are identical or different from each other, and a plurality of R3s are identical or different from each other; and R4 represents an organic group having a valency of n and having an aromatic ring which has 5 to 40 ring atoms.