US 12,265,324 B2
Agglutinant for pellicle, pellicle, exposure original plate with pellicle, method for producing semiconductor device, method for producing liquid crystal display board, method for regenerating exposure original plate, and peeling residue reduction method
Yuichi Hamada, Annaka (JP); and Akinori Nishimura, Annaka (JP)
Assigned to SHIN-ETSU CHEMICAL CO., LTD., Tokyo (JP)
Appl. No. 17/603,933
Filed by Shin-Etsu Chemical Co., Ltd., Tokyo (JP)
PCT Filed Apr. 15, 2020, PCT No. PCT/JP2020/016628
§ 371(c)(1), (2) Date Oct. 14, 2021,
PCT Pub. No. WO2020/213662, PCT Pub. Date Oct. 22, 2020.
Claims priority of application No. 2019-077837 (JP), filed on Apr. 16, 2019; application No. 2019-082301 (JP), filed on Apr. 23, 2019; and application No. 2019-082302 (JP), filed on Apr. 23, 2019.
Prior Publication US 2022/0214613 A1, Jul. 7, 2022
Int. Cl. G03F 1/64 (2012.01); G03F 1/26 (2012.01); G03F 1/66 (2012.01); G03F 7/00 (2006.01); H01L 21/027 (2006.01)
CPC G03F 1/64 (2013.01) [G03F 1/26 (2013.01); G03F 1/66 (2013.01); G03F 7/70983 (2013.01); H01L 21/0274 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A pellicle frame with an agglutinant layer, comprising a pellicle frame and an agglutinant layer provided on one end face of the pellicle frame, wherein
the agglutinant layer is provided on a side of the pellicle frame that is bonded to an exposure original plate,
the agglutinant layer comprises an agglutinant comprising a polyvinyl ether compound,
the polyvinyl ether compound is a polymer comprising vinyl ethers as a monomer component, or a polymer comprising vinyl ethers and a monomer copolymerizable with the vinyl ethers as polymerization components, and
the vinyl ethers are at least one selected from the group consisting of methyl vinyl ether, ethyl vinyl ether, butyl vinyl ether, isobutyl vinyl ether, and (2-methoxyethyl) vinyl ether.