US 12,265,255 B2
Electro-absorption modulators with stacked waveguide tapers
Yusheng Bian, Ballston Lake, NY (US); Steven M. Shank, Jericho, VT (US); Judson Holt, Ballston Lake, NY (US); Michal Rakowski, Ballston Lake, NY (US); and Bartlomiej Jan Pawlak, Leuven (BE)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Sep. 14, 2022, as Appl. No. 17/944,252.
Prior Publication US 2024/0085624 A1, Mar. 14, 2024
Int. Cl. G02B 6/122 (2006.01); G02B 6/13 (2006.01)
CPC G02B 6/1228 (2013.01) [G02B 6/13 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure comprising:
a waveguide core including a first tapered section, a second tapered section, and a longitudinal axis, the first tapered section and the second tapered section aligned along the longitudinal axis;
a first waveguide taper overlapping the first tapered section of the waveguide core;
a second waveguide taper overlapping the second tapered section of the waveguide core; and
a multiple-layer structure on the waveguide core between the first waveguide taper and the second waveguide taper, the multiple-layer structure having a first end portion and a second end portion opposite to the first end portion,
wherein the first waveguide taper wraps around the first end portion, and the second waveguide taper wraps around the second end portion.