US 12,265,200 B2
Normal-to-plane surface plasmon mode for angle-and-polarization independent optomechanical sensing
Haeri Park Hanania, San Gabriel, CA (US); and Hyuck Choo, Yongin-Si (KR)
Assigned to SAMSUNG ELECTRONICS CO., LTD., (KR)
Filed by Samsung Electronics Co., Ltd., Suwon-si (KR)
Filed on Oct. 27, 2021, as Appl. No. 17/512,658.
Claims priority of provisional application 63/217,655, filed on Jul. 1, 2021.
Prior Publication US 2023/0003920 A1, Jan. 5, 2023
Int. Cl. G02B 1/00 (2006.01); A61B 3/16 (2006.01); G01L 11/02 (2006.01); G02B 5/00 (2006.01)
CPC G02B 1/002 (2013.01) [G01L 11/02 (2013.01); G02B 5/008 (2013.01); A61B 3/16 (2013.01); A61B 2562/0285 (2013.01); G02B 2207/101 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A metamaterial structure, comprising:
a substrate, and
nanostructures located in a pattern on or within the substrate, wherein:
the nanostructures are paraboloid shaped, arranged in a periodic pattern, and reflect a target wavelength of a spectrum of light at a greater intensity than other wavelengths of the spectrum of light;
a range of height values and a range of diameter values are identified based on a determination of height values and diameter values that result in a change in peak wavelength shift of less than five nanometers over a range of angles of incidence of the spectrum of light; and
at least one of a height or a diameter of a paraboloid element of the nanostructures is selected from the range of height values and the range of diameter values.