US 12,265,141 B2
Sensor and inspection device
Akira Kikitsu, Yokohama Kanagawa (JP); Yoshihiro Higashi, Komatsu Ishikawa (JP); and Satoshi Shirotori, Yokohama Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Feb. 6, 2023, as Appl. No. 18/165,040.
Claims priority of application No. 2022-107818 (JP), filed on Jul. 4, 2022.
Prior Publication US 2024/0003999 A1, Jan. 4, 2024
Int. Cl. G01R 33/09 (2006.01); G01R 33/00 (2006.01); H10N 50/10 (2023.01)
CPC G01R 33/093 (2013.01) [G01R 33/0011 (2013.01); H10N 50/10 (2023.02)] 19 Claims
OG exemplary drawing
 
1. A sensor, comprising an element portion, the element portion including:
a first magnetic member;
a first opposing magnetic member, the first opposing magnetic member being separated from the first magnetic member in a first direction from the first magnetic member to the first opposing magnetic member;
a first element including a first magnetic layer, a position of at least a part of the first element in the first direction being between a position of the first magnetic member in the first direction and a position of the first opposing magnetic member in the first direction, the first element including a first portion and a first other portion, a second direction from the first portion to the first other portion crossing the first direction,
a second magnetic member, a direction from the first magnetic member to the second magnetic member being along the second direction;
a second opposing magnetic member, the second opposing magnetic member being separated from the second magnetic member in the first direction, a direction from the first opposing magnetic member to the second opposing magnetic member being along the second direction;
a second element including a second magnetic layer, a position of at least a part of the second element in the first direction being between a position of the second magnetic member in the first direction and a position of the second opposing magnetic member in the first direction, the second element including a second portion and a second other portion, a direction from the second portion to the second other portion being along the second direction;
a third element including a third portion and a third other portion, a third portion being electrically connected to the first portion, the third other portion being electrically connected to the second portion; and
a fourth element including a fourth portion and a fourth other portion, the fourth portion being electrically connected to the first other portion, the fourth other portion being electrically connected to the second other portion, wherein
at least one of the position of the first magnetic member in the first direction or the position of the first opposing magnetic member in the first direction is between a position of the third element in the first direction and a position of the fourth element in the first direction, and
at least one of the position of the second magnetic member in the first direction or the position of the second opposing magnetic member in the first direction is between the position of the third element in the first direction and the position of the fourth element in the first direction.