US 12,265,136 B2
Method and system for thermal control of devices in electronics tester
Jovan Jovanovic, Santa Clara, CA (US); Kenneth W. Deboe, Santa Clara, CA (US); and Steven C. Steps, Saratoga, CA (US)
Assigned to AEHR TEST SYSTEMS, Fremont, CA (US)
Filed by AEHR TEST SYSTEMS, Fremont, CA (US)
Filed on Sep. 5, 2024, as Appl. No. 18/825,962.
Application 17/532,298 is a division of application No. 16/576,555, filed on Sep. 19, 2019, granted, now 11,209,497, issued on Dec. 28, 2021.
Application 16/576,555 is a division of application No. 15/400,771, filed on Jan. 6, 2017, granted, now 10,466,292, issued on Nov. 5, 2019.
Application 18/825,962 is a continuation of application No. 18/648,873, filed on Apr. 29, 2024.
Application 18/648,873 is a continuation of application No. 17/532,298, filed on Nov. 22, 2021, granted, now 12,007,451, issued on Jun. 11, 2024.
Claims priority of provisional application 62/276,746, filed on Jan. 8, 2016.
Prior Publication US 2024/0426938 A1, Dec. 26, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. G01R 31/50 (2020.01); G01R 31/00 (2006.01); G01R 31/28 (2006.01); H01L 21/324 (2006.01); H01L 21/66 (2006.01); H01L 21/67 (2006.01); H01L 21/687 (2006.01); G01R 1/04 (2006.01)
CPC G01R 31/50 (2020.01) [G01R 31/003 (2013.01); G01R 31/2831 (2013.01); G01R 31/2875 (2013.01); H01L 21/324 (2013.01); H01L 21/67103 (2013.01); H01L 21/67109 (2013.01); H01L 21/67248 (2013.01); H01L 21/68785 (2013.01); H01L 22/26 (2013.01); G01R 1/0491 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A tester apparatus, comprising:
a portable cartridge that includes:
a cartridge body including first and second components for holding a substrate therebetween, the substrate carrying a microelectronic circuit and having a plurality of substrate terminals connected to a microelectronic circuit;
a plurality of portable cartridge contacts on the second component, the portable cartridge contacts matching the substrate terminals for making contact to the substrate terminals;
a first electrical interface on the portable cartridge body and connected to the portable cartridge contacts; and
an area seal between the first and second components, the area seal between the first and second components forming an enclosed area defined between the first component, the second component and the area seal between the first and second components;
a frame, the portable cartridge body being receivable to be held by the frame and being removable from the frame;
a second electrical interface on the frame, the second electrical interface being connected to the first electrical interface when the portable cartridge is held by the frame, and being disconnected from the first electrical interface when the portable cartridge body is removed from the frame;
an electrical tester connected through the second electrical interface, the first electrical interface, and the portable cartridge contacts to the substrate terminals so that signals are transmitted between the electrical tester and the microelectronic circuit to test the microelectronic circuit;
a gas interface secured to the frame; and
a passage connecting the gas interface to the area defined between the first component, the second component and the area seal between the first and second components when the portable cartridge body is held by the frame.