US 12,265,109 B2
Device and method for measuring microwave surface resistance of dielectric conductor deposition interface
Cheng Zeng, Sichuan (CN); Tianhui Sun, Sichuan (CN); Junsong Ning, Sichuan (CN); Shirong Bu, Sichuan (CN); and Zhanping Wang, Sichuan (CN)
Assigned to University of Electronic Science and Technology of China, Sichuan (CN)
Filed by University of Electronic Science and Technology of China, Sichuan (CN)
Filed on Jan. 19, 2023, as Appl. No. 18/098,704.
Claims priority of application No. 202210544239.X (CN), filed on May 18, 2022.
Prior Publication US 2023/0152360 A1, May 18, 2023
Int. Cl. G01R 27/26 (2006.01)
CPC G01R 27/2688 (2013.01) 6 Claims
OG exemplary drawing
 
1. A device for measuring a microwave surface resistance of a dielectric conductor deposition interface, comprising: a test platform, a calibration component, a sealing cavity and a support plate;
wherein the test platform comprises: a shielding cavity having an open bottom, a dielectric rod, an input coupling structure, an output coupling structure, and a dielectric supporter; wherein the input coupling structure and the output coupling structure are symmetrically distributed on two sides of the shielding cavity; the dielectric rod is located inside the shielding cavity, and is fixed to the shielding cavity by the dielectric supporter; a bottom end of the dielectric rod and a bottom end of the shielding cavity are on a same plane;
wherein a dielectric conductor test sample is placed on the bottom end of the dielectric rod and a bottom concave of the shielding cavity, and is detachably fastened by the support plate to form a TE0m(n+δ) (m, n=1, 2, 3 . . . ) mode dielectric resonator with the test platform; wherein the dielectric conductor test sample is obtained by depositing a conductor on a dielectric; a dielectric side of the dielectric conductor test sample faces an interior of the dielectric resonator, and a conductor side is attached to the support plate;
wherein the calibration component is detachably arranged on the bottom end of the shielding cavity; and
wherein the sealing cavity is detachably arranged on an extension part of the bottom end of the shielding cavity.