US 12,265,101 B1
Load pull tuner for waveguide wafer probe
Christos Tsironis, Kirkland (CA)
Filed by Christos Tsironis, St-Laurent (CA)
Filed on Apr. 12, 2023, as Appl. No. 18/133,554.
Int. Cl. G01R 31/26 (2020.01); G01R 1/02 (2006.01); G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 27/00 (2006.01); G01R 27/04 (2006.01); G01R 31/28 (2006.01); G01R 35/00 (2006.01); H01P 3/02 (2006.01); H01P 5/08 (2006.01)
CPC G01R 1/07378 (2013.01) [G01R 1/06755 (2013.01); H01P 3/023 (2013.01); H01P 5/08 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A load pull tuner incorporated in a waveguide-to-wafer-probe adapter comprising:
a partly slotted waveguide-to-wafer-probe adapter, and
two mobile reflective tuning probes, a first tuning probe and a second tuning probe, and remote control of the tuning probes,
wherein
the partly slotted waveguide-to-wafer-probe adapter comprises:
a rectangular waveguide transmission line having a top and a bottom broad wall and two narrow side walls and is divided into three sections joined by knee junctions: a sloped section between a vertical section and a horizontal section, the vertical section being attached to a wafer-probe head and the horizontal section being attached to a waveguide flange;
and wherein
the sloped section includes two slots, centered on the top broad wall along the waveguide, a first slot towards the vertical section and a second slot towards the horizontal section, said slots comprising a portion inside the sloped section and a protrusion inside and traversing the knee junctions;
and wherein
two mobile carriages, a first mobile carriage and a second mobile carriage, are saddled on and slide along the sloped section of the waveguide, controlled using stepper motors and appropriate gear;
and wherein
the first tuning probe is attached to the first mobile carriage and the second tuning probe is attached to the second mobile carriage;
and wherein
the tuning probes are inserted contactless at fixed penetration into the slots, the first tuning probe into the first slot and the second tuning probe into the second slot.