US 12,265,055 B2
Method of providing contacts on a graphene sheet
Lok Yi Lee, Somersham (GB); Hugh Glass, Somersham (GB); Simon Thomas, Somersham (GB); and Ivor Guiney, Somersham (GB)
Assigned to Paragraf Limited, Somersham (GB)
Filed by PARAGRAF LIMITED, Somersham (GB)
Filed on Nov. 23, 2021, as Appl. No. 17/533,540.
Claims priority of application No. 2019412 (GB), filed on Dec. 9, 2020.
Prior Publication US 2022/0178872 A1, Jun. 9, 2022
Int. Cl. H01L 21/3065 (2006.01); G01N 27/414 (2006.01); H01L 29/16 (2006.01); H01L 29/66 (2006.01)
CPC G01N 27/4145 (2013.01) [H01L 21/3065 (2013.01); H01L 29/1606 (2013.01); H01L 29/66045 (2013.01)] 14 Claims
OG exemplary drawing
 
1. A method of forming a material on a graphene layer structure for injecting charge into, or extracting charge out of, the graphene layer structure, the method comprising:
providing a graphene layer structure having one or more first portions on a non-metallic substrate, said one or more first portions having one or more surface defects comprising excess out-of-plane material;
plasma etching the one or more first portions of the graphene layer structure to remove the out-of-plane material;
depositing a material for injecting charge into, or extracting charge out of, the graphene layer structure onto the one or more plasma-etched first portions.