US 12,265,048 B2
Moisture detection along input/output opening in IC structure
Zhuojie Wu, Port Chester, NY (US)
Assigned to GlobalFoundries U.S. Inc., Malta, NY (US)
Filed by GlobalFoundries U.S. Inc., Malta, NY (US)
Filed on Nov. 23, 2022, as Appl. No. 18/058,349.
Prior Publication US 2024/0167974 A1, May 23, 2024
Int. Cl. G01N 27/22 (2006.01); G02B 6/12 (2006.01)
CPC G01N 27/223 (2013.01) [G02B 6/12004 (2013.01); G02B 2006/12138 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An integrated circuit (IC) structure, comprising:
a substrate; and
a plurality of moisture sensors along an edge of an input/output (I/O) opening in the substrate, the plurality of moisture sensors positioned laterally between a primary guard ring and a moisture barrier.