US 12,265,047 B2
Sensor, including a diaphragm that is open through a clearance, for measuring the concentration of an analysis fluid
Renate Mueller, Reutlingen (DE); Helmut Grutzeck, Kusterdingen (DE); and Stefan Zehringer, Reutlingen (DE)
Assigned to ROBERT BOSCH GMBH, Stuttgart (DE)
Appl. No. 17/634,415
Filed by Robert Bosch GmbH, Stuttgart (DE)
PCT Filed Sep. 21, 2020, PCT No. PCT/EP2020/076282
§ 371(c)(1), (2) Date Feb. 10, 2022,
PCT Pub. No. WO2021/078449, PCT Pub. Date Apr. 29, 2021.
Claims priority of application No. 10 2019 216 129.4 (DE), filed on Oct. 21, 2019.
Prior Publication US 2022/0317078 A1, Oct. 6, 2022
Int. Cl. G01N 27/18 (2006.01); G01N 33/00 (2006.01)
CPC G01N 27/18 (2013.01) [G01N 33/0027 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A sensor for measuring a concentration of an analysis fluid based on a thermal conductivity principle, the sensor comprising:
at least one analysis heating element, situated on a measuring diaphragm, configured to heat the analysis fluid;
a reference heating element, situated on a reference diaphragm, configured to heat at least one reference fluid, wherein:
the measuring diaphragm and the reference diaphragm are situated adjacent to each other as parts of a diaphragm layer that is arranged in a plane that is vertically between a sensor substrate and a cap substrate;
the measuring diaphragm is situated in a measuring volume; and
the reference diaphragm is situated in a reference volume;
at least one coating coats each of the measuring diaphragm and the reference diaphragm; and
at least one clearance is situated in the measuring diaphragm via which the analysis fluid is able to flow vertically from one side of the measuring diaphragm facing towards the sensor substrate to an opposite side of the measuring diaphragm facing towards the cap substrate.