US 12,265,042 B2
X-ray fluorescence analyzer
Yasuyuki Okamoto, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Appl. No. 18/036,552
Filed by Shimadzu Corporation, Kyoto (JP)
PCT Filed Jun. 9, 2021, PCT No. PCT/JP2021/021853
§ 371(c)(1), (2) Date May 11, 2023,
PCT Pub. No. WO2022/102153, PCT Pub. Date May 19, 2022.
Claims priority of application No. 2020-188416 (JP), filed on Nov. 12, 2020.
Prior Publication US 2023/0408428 A1, Dec. 21, 2023
Int. Cl. G01N 23/223 (2006.01); G01N 23/2204 (2018.01)
CPC G01N 23/223 (2013.01) [G01N 23/2204 (2013.01); G01N 2223/076 (2013.01); G01N 2223/309 (2013.01)] 6 Claims
OG exemplary drawing
 
1. An X-ray fluorescence analyzer for analyzing constituent elements of a sample, comprising:
a sample stage having an opening, the sample stage being configured to place a sample thereon so that the sample is exposed from the opening;
an X-ray source configured to irradiate the sample with primary X-rays from below the sample stage through the opening;
a detector configured to detect fluorescence X-rays generated from the sample;
an analyzer configured to analyze the constituent elements based on the fluorescence X-rays;
a measuring device configured to measure a height of a surface of the sample exposed from the opening;
a determination unit configured to determine whether a height difference between the height measured by the measuring device and a height of an upper surface of the sample stage is within a tolerance; and
a notification unit configured to notify a determination result of the determination unit.