| CPC G01N 15/10 (2013.01) [G01N 2015/0046 (2013.01); G01N 2015/1024 (2024.01)] | 13 Claims |

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1. A particle measuring device, comprising: a probe including: a nozzle configured to spray a gas toward a surface of an object; and an inlet configured to inhale the gas and particles scattered from the surface by the gas; a main pipe including: an inflow hole through which the gas flows; and a discharge hole through which the gas is discharged; a first manifold provided to connect the main pipe to the nozzle, and being configured to supply the gas passing through the main pipe to the nozzle; a second manifold provided to connect the main pipe to the inlet between a connecting portion of the first manifold and the discharge hole, and being configured to supply the particles and the gas to the main pipe; a third manifold branched from the second manifold, and being configured to supply the particles and the gas; a particle counter connected to the third manifold, and being configured to count the particles included in the gas supplied through the third manifold; and an ejector provided on a connection portion where the main pipe and the second manifold are connected to each other, and being configured to inhale and transport the particle sand the gas through the second manifold using a pressure energy of the gas passing through the main pipe.
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