CPC G01N 15/0227 (2013.01) [G01N 21/05 (2013.01); G01N 2021/0112 (2013.01); G01N 2021/052 (2013.01)] | 11 Claims |
1. A particle measuring device, comprising:
a diffractive optical element configured to shape light for irradiating a particle into a flat top beam, where a cross section of the flat top beam at a focal position has a substantially oblong-and-sheet shape;
a flow cell configured to form a flow passage for a sample therein;
a light source configured to emit irradiation light;
a photodetector element located opposed to a flow direction of the sample and at a position obtained by extending a prescribed section of the flow passage in the flow direction of the sample,
wherein the photodetector element detects light scattered from a particle included in the sample, where the particle passes a detection region formed in the prescribed section of the flow passage by irradiating with the irradiation light;
a processor configured to obtain a particle size of the particle with analyzing on a basis of the scattered light, in which the diffractive optical element shapes the irradiation light and irradiates the sample flowing through the prescribed section with shaped irradiation light; and
a slit configured to separate a principal light beam from high-order diffraction light generated in a process that the diffractive optical element shapes the irradiation light.
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