US 12,264,979 B2
Force sensing device and sensor and piezoelectric element thereof
Yu-Jen Wang, Kaohsiung (TW); Yu-Jan Lo, Kaohsiung (TW); and Ren-Yi Huang, Kaohsiung (TW)
Assigned to NATIONAL SUN YAT-SEN UNIVERSITY, Kaohsiung (TW)
Filed by NATIONAL SUN YAT-SEN UNIVERSITY, Kaohsiung (TW)
Filed on Dec. 14, 2021, as Appl. No. 17/549,995.
Claims priority of application No. 110138618 (TW), filed on Oct. 18, 2021.
Prior Publication US 2023/0122971 A1, Apr. 20, 2023
Int. Cl. H01L 41/113 (2006.01); G01L 1/16 (2006.01); H10N 30/30 (2023.01); H10N 30/80 (2023.01)
CPC G01L 1/16 (2013.01) [H10N 30/302 (2023.02); H10N 30/802 (2023.02)] 14 Claims
OG exemplary drawing
 
1. A force sensing device comprising:
at least one upper base;
a lower base; and
at least one first sensor disposed between the at least one upper base and the lower base and including an upper casing and a piezoelectric element, the upper casing is configured to cover and contact the piezoelectric element and located between the at least one upper base and the piezoelectric element, the piezoelectric element includes a driving portion and a sensing portion, the driving portion is configured to be applied with a first voltage to generate a vibration in the piezoelectric element, the sensing portion is configured to sense the vibration transmitted from the driving portion to output a second voltage, wherein when an external force is applied to the upper base, the external force is transmitted from the at least one upper base and the upper casing to the piezoelectric element and configured to suppress the vibration in the piezoelectric element and change the second voltage output from the sensing portion such that the external force is configured to be measured using variation of the second voltage.