US 12,264,954 B2
Flow sensor element
Masahiro Shimodaira, Nagano (JP); and Katsuya Miura, Nagano (JP)
Assigned to KOA CORPORATION, Nagano (JP)
Appl. No. 18/013,705
Filed by KOA CORPORATION, Nagano (JP)
PCT Filed Jun. 16, 2021, PCT No. PCT/JP2021/022792
§ 371(c)(1), (2) Date Dec. 29, 2022,
PCT Pub. No. WO2022/004373, PCT Pub. Date Jan. 6, 2022.
Claims priority of application No. 2020-113910 (JP), filed on Jul. 1, 2020.
Prior Publication US 2023/0296418 A1, Sep. 21, 2023
Int. Cl. G01F 1/692 (2006.01); G01F 1/684 (2006.01); G01F 1/696 (2006.01); G01K 7/16 (2006.01); G01K 13/02 (2021.01); G01P 5/12 (2006.01); H01C 7/00 (2006.01); H01C 7/22 (2006.01); G01K 7/20 (2006.01)
CPC G01F 1/692 (2013.01) [G01F 1/684 (2013.01); G01F 1/696 (2013.01); G01K 7/16 (2013.01); G01K 13/02 (2013.01); G01P 5/12 (2013.01); H01C 7/006 (2013.01); H01C 7/22 (2013.01); G01K 7/20 (2013.01)] 3 Claims
OG exemplary drawing
 
1. A flow sensor element comprising:
a base body having a spherical shape; and
a temperature-sensitive film pattern that is disposed over an entirety of a surface of the base body, and changes in an electrical resistance value due to a change in temperature,
wherein first and second ends of the temperature-sensitive film pattern are respectively connected to a first wiring portion and a second wiring portion,
the first wiring portion passes through a through-hole that is formed in the base body, and is led out in a same direction as a direction of the second wiring portion, and
the first wiring portion is connected and fixed to the first end of the temperature-sensitive film pattern via an electrode that is embedded in an opening of the through-hole.