US 12,264,947 B2
Measuring system, measuring device, and measuring method
Takayuki Hatanaka, Miyagi (JP); Kimihiro Yokoyama, Miyagi (JP); and Norihiko Amikura, Miyagi (JP)
Assigned to Tokyo Electron Limited, Tokyo (JP)
Filed by Tokyo Electron Limited, Tokyo (JP)
Filed on May 17, 2023, as Appl. No. 18/319,172.
Claims priority of application No. 2022-082269 (JP), filed on May 19, 2022.
Prior Publication US 2023/0375371 A1, Nov. 23, 2023
Int. Cl. G01D 5/241 (2006.01); G01B 7/00 (2006.01); G01B 7/04 (2006.01); G01B 7/14 (2006.01); G01B 11/27 (2006.01); H01L 21/687 (2006.01)
CPC G01D 5/2417 (2013.01) [G01B 7/003 (2013.01); G01B 7/044 (2013.01); G01B 7/14 (2013.01); G01B 11/27 (2013.01); H01L 21/68707 (2013.01); G01D 5/2412 (2013.01)] 9 Claims
OG exemplary drawing
 
1. A measuring system that acquires a measurement value indicating electrostatic capacitance between a measuring device and a first object for transporting the measuring device,
wherein the first object includes a body on which the measuring device is loaded, and a target electrode provided on the body,
the measuring device includes:
a disc-shaped base board;
a first sensor provided along a bottom surface of the disc-shaped base board; and
a circuit board installed on the disc-shaped base board and connected to the first sensor, and
the first sensor includes:
a central electrode configured to acquire electrostatic capacitance for reflecting a distance with the target electrode; and
a peripheral electrode disposed around the central electrode to acquire electrostatic capacitance for reflecting an amount of deviation in a horizontal direction with respect to the target electrode of the first object.