US 12,264,916 B2
Sensor and electronic device
Ryunosuke Gando, Yokohama Kanagawa (JP); Daiki Ono, Yokohama Kanagawa (JP); Yasushi Tomizawa, Tokyo (JP); Fumito Miyazaki, Yokohama Kanagawa (JP); Shiori Kaji, Kawasaki Kanagawa (JP); Kei Masunishi, Kawasaki Kanagawa (JP); Hiroki Hiraga, Saitama Saitama (JP); Etsuji Ogawa, Kawasaki Kanagawa (JP); and Kengo Uchida, Kawasaki Kanagawa (JP)
Assigned to Kabushiki Kaisha Toshiba, Tokyo (JP)
Filed by KABUSHIKI KAISHA TOSHIBA, Tokyo (JP)
Filed on Aug. 8, 2022, as Appl. No. 17/818,095.
Claims priority of application No. 2021-187035 (JP), filed on Nov. 17, 2021.
Prior Publication US 2023/0152099 A1, May 18, 2023
Int. Cl. G01C 19/5776 (2012.01); G01C 19/5642 (2012.01); G01C 19/5712 (2012.01); G01P 15/08 (2006.01); G01P 15/097 (2006.01); G01P 15/125 (2006.01)
CPC G01C 19/5776 (2013.01) [G01C 19/5642 (2013.01); G01C 19/5712 (2013.01); G01P 15/0802 (2013.01); G01P 15/097 (2013.01); G01P 15/125 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A sensor, comprising:
a sensor element;
a housing provided around the sensor element; and
a processor,
the sensor element including
a base body including a first base body region and a second base body region,
a first sensor part provided in the first base body region, the first sensor part including a first sensor movable part which can vibrate, vibration of the first sensor movable part including a first component in a first direction and a second component in a second direction crossing the first direction, and
a second sensor part provided in the second base body region and including a first beam and a second beam,
the processor being configured to derive a rotation angle and an angular velocity based on a signal obtained from the first sensor movable part,
the processor being configured to detect an acceleration and a temperature based on a first resonance frequency of the first beam and a second resonance frequency of the second beam, and
the processor being configured to correct the rotation angle and the angular velocity based on at least one of the temperature or the acceleration,
wherein the processor is configured to correct at least one of the acceleration or the temperature based on the angular velocity being corrected based on the at least one of the temperature or the acceleration.