US 12,264,915 B2
MEMS gyroscope
Zhao Ma, Shenzhen (CN); Zhan Zhan, Shenzhen (CN); Shan Yang, Shenzhen (CN); Xiao Kan, Shenzhen (CN); Shitao Yan, Shenzhen (CN); Yang Li, Shenzhen (CN); Hongtao Peng, Shenzhen (CN); Kahkeen Lai, Singapore (SG); Veronica Tan, Singapore (SG); and Yan Hong, Shenzhen (CN)
Assigned to AAC Kaitai Technologies (Wuhan) CO., LTD, Wuhan (CN)
Filed by AAC Kaitai Technologies (Wuhan) CO., LTD, Hubei (CN)
Filed on Jul. 26, 2022, as Appl. No. 17/873,195.
Claims priority of application No. 202210061281.6 (CN), filed on Jan. 19, 2022.
Prior Publication US 2023/0228569 A1, Jul. 20, 2023
Int. Cl. G01C 19/5712 (2012.01)
CPC G01C 19/5712 (2013.01) 10 Claims
OG exemplary drawing
 
1. A MEMS gyroscope, comprising:
a substrate;
a first unit and a second unit arranged on the substrate along a first direction; the first unit being connected with the second unit through a coupling spring;
a driving electrode and a plurality of detection electrodes formed on the substrate, wherein:
the first unit includes a first weight and a second weight arranged along a second direction perpendicular to the first direction; the second unit includes a third weight and a fourth weight disposed oppositely along the second direction;
and wherein the MEMS gyroscope further includes a first set of coupling structures disposed on opposite sides of the first weight and the second weight along the second direction; the first set of coupling structures is connected with the first weight and the second weight through a first set of elastic beams; and
the MEMS gyroscope further includes a second set of coupling structures disposed on opposite sides of the third weight and the fourth weight along the second direction; the second set of coupling structures is connected with the third weight and the fourth weight through a second set of elastic beams; the coupling structures in the first set of coupling structures and the second set of coupling structures opposite along the first direction are connected by the coupling spring.