CPC G01C 19/5712 (2013.01) | 10 Claims |
1. A MEMS gyroscope, comprising:
a substrate;
a first unit and a second unit arranged on the substrate along a first direction; the first unit being connected with the second unit through a coupling spring;
a driving electrode and a plurality of detection electrodes formed on the substrate, wherein:
the first unit includes a first weight and a second weight arranged along a second direction perpendicular to the first direction; the second unit includes a third weight and a fourth weight disposed oppositely along the second direction;
and wherein the MEMS gyroscope further includes a first set of coupling structures disposed on opposite sides of the first weight and the second weight along the second direction; the first set of coupling structures is connected with the first weight and the second weight through a first set of elastic beams; and
the MEMS gyroscope further includes a second set of coupling structures disposed on opposite sides of the third weight and the fourth weight along the second direction; the second set of coupling structures is connected with the third weight and the fourth weight through a second set of elastic beams; the coupling structures in the first set of coupling structures and the second set of coupling structures opposite along the first direction are connected by the coupling spring.
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